Rainbow Research Optics, Inc. offers a variety of mirrors for handling the many ranges and high powers of excimer lasers. These mirrors cover the laser lines of ArF (λ = 193 nm) and XeF (λ = 352 nm). These external cavity, high-energy excimer laser mirrors have been designed to withstand high pulsed powers. Each optic provides better than λ/10 surface flatness and surface finishes of 10-5 scratch-dig.
ArF and XeF Excimer Laser Line Mirrors
High Damage Threshold